規格 | 行程 | 準確度 | 雙向重現性 | 解析度 | 俯仰 | 偏擺 | 最大速度 | 最大加速度 | 連續推力 | 負載能力 | 平台質量 | 材質 |
Travel | Accuracy | Bidirectional Repeatability | Resolution | Pitch | Yaw | Maximum Speed | Maximum Acceleration | Continuous Force | Load Capacity | Stage Mass | Material | |
(mm) | (µm) | (µm) | (µm) | (arc sec) | (arc sec) | (m∕s) | (g) | (N) | (kg) | (kg) |
| |
XY-100 | 100 * 100 | ±2 | ±1.5 | 0.1 | 8 | 8 | 500 | 0.2 | 46 | 6 | 10 | 鋁合金 |
XY-200 | 200 * 200 | ±2 | ±1.5 | 0.1 | 8 | 8 | 500 | 0.2 | 57 | 14 | 24 | 鋁合金 |
XY-300 | 300 * 300 | ±2 | ±1.5 | 0.1 | 10 | 10 | 500 | 0.2 | 69 | 20 | 50 | 鋁合金 |
型號 | 2D檔下載 | |
---|---|---|
XY-100 | XY線馬平台型錄(XY100_300).pdf | |
XY-200 | XY線馬平台型錄(XY100_300).pdf | |
XY-300 | XY線馬平台型錄(XY100_300).pdf |